TECHNOLOGIES & APPLICATIONS
TITAN: AN ION SOURCE
Purpose
The Titan ion source depends for its operation on two forms of arc discharge with a common hollow anode initiated simultaneously or one after another.
A constricted discharge between cathode 1 and hollow anode 2 serves to generate gas ions and initiate a vacuum arc (with the discharge operating time being 20 ms). Metal ions are generated in the cathode spots of the vacuum arc initiated between electrode 2 and electrode 3. The ions are extracted from the plasma surface stabilized by fine-mesh metal grid 4. The ions are accelerated to a required energy by a dc accelerating voltage applied at the gap between hollow anode 2 and electrode 5. The latter consists of two grids made of metal wires and showing a high geometrical transparency. The accelerated ion beam is taken by a collector on which specimens or machine parts are placed. To cut off the secondary electrons knocked out from the collector by the ions, a negative potential of no less than 15 kV is applied to one of the grids of electrode 6. Insulator 7 is filled with transformer oil. The source is cooled with water circulating through a radiator.
1. | Accelerating voltage | 20-80 kV |
2. | - Vacuum arc current - Constricted arc current | 50-150 A 30-60 A |
3. | - Metal ion beam current - Gas ion beam current | 0.1-0.5 A 0.1-0.25 A |
4. | Operating pulse repetition rates | |
5. | Current pulse duration | 400 ms |
6. | Delay of vacuum arc initiation from constricted arc initiation | 0-400 ms |
7. | Ion beam cross-sectional area | 250 cm2 |
8. | Vacuum arc operation time with-out changing the cathode | 30 h |
9. | Constricted arc operation time without changing the cathodes | 100 h |
10. | Source power supply voltage | 3х380 V |
11. | Excess pressure of compressed gas in the source | 2-10 atm |
The source is capable to produce ion beams of any gases (except oxygen) and metals.
For further information please contact:
Georgy Yu. Yushkov
Dr. Sci. (Engineering), Leading Researcher
Phone: (3822) 49-17-76
Fax: (3822) 49-24-10
E-mail: gyushkov@hcei.tsc.ru
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