TECHNOLOGIES & APPLICATIONS
ARC-SUPPRESSION DEVICES FOR HIGH-POWER MAGNETRON SPUTTERING SYSTEMS
One of the main problems at a high-power magnetron sputtering system operation, especially under reactive sputtering regimes, is cathode arcing. Anomalous glowing discharge transition into the arc stage occurs due to the availability of inhomogeneities at the cathode, field sharpening, dielectric impurities. To control arcing, it is necessary to use switches with operating time of the order of one microsecond. The most appropriate for this aim are insulated gate bipolar transistors (IGBT). We have developed, fabricated and tested the arc-suppression system made at coupled IGBT module. The device is connected into the magnetron feed circuit between the direct current supply source and magnetron. The switch control scheme fulfils the following main functions:
- Automatic switch breaking when discharge current achieves the limiting value with the following switching, the delay time is no less than 1 ms.
- Manual adjustment of the discharge average power by changing the off-duty factor of control pulses opening the IGBT module.
Switch control is made from the remote control panel.
|Protection operation time||1 - 5 ms.|
|Energy educed in the arc||no more tham 50 mJ|
|Switched power||up to 40 kW|
|Switched operating voltage||up to 800 W|
|Operating current||up to 50 A|
|Control range of protection operation current||30 - 100 A|
For further information please contact:
Andrei A. Solovjev
Ph. D. (techn.), Acting Laboratory Head
Phone: (3822) 49-16-51
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